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LED

COW Inspection System

Feature:
1.      Automatic loading and unloading, with bar-code reading.
2.      High resolution optical system.
3.      High Speed and high precision inspection system.
 
Specification
1.      Application:2”& 4” COW.
2.      Chip Size:6mil~46mil.
3.      Inspected Items:Scratch, contamination, broken line, crack, ITO disappear, gold remainder on emitting area, EPI defect,etc.
4.      Image Resolution:1.4um/pixel.
5.      Cassette:Two cassettes, Each cassette contains 25 PCS wafer.
6.      Machine Dimensions:810mm(W) x 727mm(D) x1852mm(H).
7.      Machine Weight:250kg.
8.      Throughput:50 pcs/hour (2 inch wafer).